The EELS technique was employed here to analyze the respective Silicon, Nitrogen and Oxygen contents in a 64 Meg Trench Capacitor DRAM. The area denoted by the rotated square on the left is shown at higher magnification in Figure (a). Beside that, in Figure (b), is the EELS map taken from the Trench capacitor. As shown below, the map is colour coded, with red, green and blue representing Oxygen, Nitrogen and Silicon respectively.