FIB (Focused Ion Beam) Tutorials
A growing list of simple tutorials explaining focused ion beam (FIB).
FIB Induced DepositionFIB is a charged particle beam with a much greater mass than the charged particles (electron) used in FEB (Focused Electron Beam). As shown...
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The Effects of Gas Assisted Etching (GAE)The image below demonstrates the effects of Gas Assisted Etching (GAE).
The image shows an integrated circuit that has been etched over a large...
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Grain Orientation ContrastFIB combines the capability of specimen preparation and imaging all in
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Circuit Edit using FIB A: FIB Cut to Metal 1
FIB milling using Gas Assisted Etching (GAE) is used to create a high aspect ratio hole through Metal...
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Introduction: Focused Ion Beam SystemsFocused ion beam (FIB) systems have been produced commercially for more than twenty years, primarily for large semiconductor manufacturers. FIB systems operate in a similar...
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FIB Deformation ContrastDeformation Contrast highlights the variation in conductivity within
an image. Both FIB (focused ion beam) secondary electron and secondary ion images exhibit
deformation contrast, which can be...
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FIB Voltage ContrastAn array structure containing failing contacts has been parallel
lapped to reveal the top of the contacts. FIB (focused ion beam) passive voltage contrast
imaging lights up...
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FIB Chemical Contrast
Both focused ion beam secondary electron (SE) and secondary ion (SI) images exhibit chemical contrast. The contrast in SE images, however, is much less...
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