FIB (Focused Ion Beam) Tutorials

A growing list of simple tutorials explaining focused ion beam (FIB).

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FIB Induced Deposition

FIB is a charged particle beam with a much greater mass than the charged particles (electron) used in FEB (Focused Electron Beam). As shown...
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The Effects of Gas Assisted Etching (GAE)

The image below demonstrates the effects of Gas Assisted Etching (GAE). The image shows an integrated circuit that has been etched over a large...
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Grain Orientation Contrast

FIB combines the capability of specimen preparation and imaging all in ...
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Circuit Edit using FIB

A: FIB Cut to Metal 1 FIB milling using Gas Assisted Etching (GAE) is used to create a high aspect ratio hole through Metal...
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Introduction: Focused Ion Beam Systems

Focused ion beam (FIB) systems have been produced commercially for more than twenty years, primarily for large semiconductor manufacturers. FIB systems operate in a similar...
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FIB Deformation Contrast

Deformation Contrast highlights the variation in conductivity within an image. Both FIB (focused ion beam) secondary electron and secondary ion images exhibit deformation contrast, which can be...
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FIB Voltage Contrast

An array structure containing failing contacts has been parallel lapped to reveal the top of the contacts. FIB (focused ion beam) passive voltage contrast imaging lights up...

FIB Chemical Contrast

Both focused ion beam secondary electron (SE) and secondary ion (SI) images exhibit chemical contrast. The contrast in SE images, however, is much less...
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