FIB Application

Secondary Electron vs. Secondary Ion FIB imaging Modes - Part I

Keywords :
Secondary ion imaging, Secondary electron imaging, Failiure analysis, Failure analysis, Bond pads, IC
  • structural_analysis_0164643322.jpg
    Figure 1:FIB secondary electron image of mechanical damage to a bond pad.
  • structural_analysis_0274571530.jpg
    Figure 2:Same area imaged in FIB secondary ion mode, which reveals additional detail in the dielectrics.
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Having multiple detector types on the same tool can be useful for a variety of reasons, but the yield and what is subsequently revealed will depend on what the operator is imaging with (ions or electrons).