FIB (Focused Ion Beam) Applications

Circuit Edit & Device Modification

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Secondary Electron vs. Secondary Ion FIB imaging Modes - Part I

Having multiple detector types on the same tool can be useful for a variety of reasons, but the yield and what is subsequently revealed will...

Material Science

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FIB Sectioning & Imaging of Powders and Particulates

FIB cross-sectioning and imaging of Ni powders.  In both cases the powders were sprinkled on conductive carbon tape and any excess was blown off.  No coating, embedding,...
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Site-specific TEM Specimen Preparation of Grain Boundary Corrosion in Nickel-Based Alloys Using the FIB "Plan-View Lift-Out" Technique

Use of the focused ion beam (FIB) microscope allows site-specific specimen preparation for TEM analyses in a routine manner not realizable with any other technique....
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FIB Sectioning and Imaging of Painted, Galvanized Autobody Steel

This section illustrates the relative insensitivity of FIB sectioning to variations in specimen density and hardness. Here, a relatively soft, polymeric paint layer with particle reinforcement covers...
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Sectioning through an Aluminum Beverage Can and Polymer Label

This FIB image shows a FIB cross-section into an aluminum beverage can, tilted to 45 degrees and imaged in the FIB in secondary electron mode....
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Using FIB Secondary Ion Images to Observe the Presence of Corrosion

Comparative FIB images of a crack in pipeline steel are shown, acquired using secondary electron and secondary ion signals. The ion image (inset) highlights the...
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Focused Ion Beam TEM Specimen Preparation of Oxide Films on Zirconium-based Alloys

Precision, "stress-free" FIB sectioning can be used to prepare EELS thin TEM cross-sections of "challenging" specimens, such as this surface oxide grown in 300 degrees...
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STEM - EDX Analysis of Arsenic Doping Around Trench Capacitor Cells

The feasibility of using EDX in a FEG TEM to measure the arsenic dopant concentration in a modern semiconductor device was examined and the results...
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TEM Image of a Microprocessor Prepared by FIB

This is a transmission electron microscope image of a section of a microprocessor. The cross-section was prepared using a FIB to precisely section the...
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FIB Sectioning & Imaging of Nickel Metal Foam Used in Rechargeable Batteries

The positive electrodes in Ni-based rechargeable batteries are a complex composite consisting essentially of a mixture of fine powders of Ni and Ni(OH)2 that are...
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Sectioning and Imaging Battery Electrodes Without Mechanical Pre-Preparation

FIB sectioning can sometimes be accomplished without the need for mechanical pre-preparation, as is shown here in a FIB secondary electron image taken at the...
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FIB SE Imaging of a FIB Cross-section through the Surface of 200 ISO Colour Photographic Film

This FIB secondary electron image shows a FIB cross-section of a sample of color photographic film. No special specimen preparation was required; a piece of...
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Investigating Surface Corrosion on Stainless Steel: Painlessly Linking Surface Features to Subsurface Morphology

Without the need for external specimen preparation, this FIB cross-section reveals the state of stainless steel after testing for several hours in a corrosive environment...

Nanofabrication & Nanoprototyping using FIB

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Steps in TEM Specimen Preparation by "Lift-out" Method

The "lift-out" technique has numerous qualities that make it attractive to industry when requiring TEM analysis. The total fabrication time for a site specific TEM...
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Nanofabrication and Microfabrication using a Focused Ion Beam (FIB)

The precise sectioning and imaging capabilities of focused ion beam (FIB) milling, combined with its ability to etch complex patterns (including bitmapped images), make focused...
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Milling Microfluidic Channels into Silicon using a Focused Ion Beam (FIB)

Fluids constrained into micrometer scale structures behave differently than fluids flowing into a macro-scale environment, like water into a copper pipe. Microfluidics, with applications in...

Failure analysis

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Study of Stress Corrosion Cracking in Pipeline Steel

Precision FIB sectioning of a pipeline steel stress corrosion crack (SCC) allows measurement of the crack's length and depth. High magnification images of the FIBeamed...
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