Our instruments
- ZEISS Crossbeam 540
- ZEISS Sigma HD VP
- ZEISS ORION NanoFab
- ZEISS NVision 40 FIB / FE SEM with Gemini SEM
- Micrion 2500 Focused Ion Beam (FIB) microscope systems
- DCG/Credence OptiFIB III with integrated optical column.
All FIBs have a full set of process gases*, including:
- Tungsten (W)
- Platinum (Pt)
- Molybdenum (Mo)
- Tetra Methyl Cyclo Tetra Siloxane (TMCTS)
- Xenon Difloride (XeF2)
- Chlorine (Cl2)
- Oxygen (O2)
- Hydrogen (H2O)
- Carbon (C)
- Copper (Cu) Etch
- etc.
*although not all gases on each FIB