Our instruments
- Micrion 2500 Focused Ion Beam (FIB) microscope systems
- FEI Vectra "FlipChip" 8" Wafer FIB
- DCG/Credence OptiFIB III with integrated optical column.
- Zeiss NVision FIB / FE SEM with Gemini SEM and Oxford Instruments EDS & EBSD
All FIBs have a full set of process gases*, including:
- Tungsten (W)
- Platinum (Pt)
- Molybdenum (Mo)
- Tetra Methyl Cyclo Tetra Siloxane (TMCTS)
- Xenon Difloride (XeF2)
- Chlorine (Cl2)
- Bromine (Br2)
- Oxygen (O2)
- Hydrogen (H2O)
- Carbon (C)
- Copper (Cu) Etch
- etc.
*although not all gases on each FIB
On-site access to major Canadian government research facilities at the National Research Council and Materials Technology Laboratories, covering a range of complementary techniques.