FIB Chemical Contrast
Both FIB(focused ion beam) secondary electron and secondary ion (SI) images exhibit
chemical contrast, but in SE images it is much less interpretable than
SEM BSE images as FIB contrast is not substantially related to atomic
number. In certain cases, FIB SI images show greatly enhanced chemical
contrast which is readily interpretable, such as in the presence of
oxygen at the grain boundaries of metallic samples.
FIB secondary ion imaging of a nickel based superalloy exhibiting
grain boundary corrosion.
Intergranular attack in Ni-based Alloy 600
Note that the grain boundary corrosion is highlighted in FIB
secondary ion imaging mode due to the significantly enhanced secondary
ion yield of a metal in the presence of oxygen. |