Fibics Pattern
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FIB
  • FIB for Semiconductor Applications
  • Device Modification (Microsurgery)
  • Probe Pad & Window Creation
  • Parallel Lapping
  • TEM Specimen Preparation
    • TEM
  • TEM for Semiconductor Applications
    • SIMS
  • SIMS for Semiconductor Applications
  • Application Examples
  • Additional Analytical Services
    • SIMS for Semiconductor Applications
    Fibics Incorporated offers SIMS services for the semiconductor industry. We would be very happy to discuss your SIMS specific requirements. Please contact us for more information about our SIMS services.
    SIMS image
    Atomika 4500 Ultra-Shallow SIMS
  • Atomika 4500 Ultra-Shallow SIMS (Cs, O, Ga columns - suitable for ultra-shallow depth profiling with Cs & O, and high resolution SIMS imaging with Ga, as well as fundamental investigation of Ga FIB phenomena).
    • In addition to our own state-of-the-art Atomika 4500 quadrupole SIMS, Fibics has on-site access to a Cameca magnetic sector SIMS.
    Cameca ims4f Magnetic Sector Secondary Ion Mass Spectrometer (SIMS)
  • Cesium (Cs), Oxygen (O) or Argon (Ar) primary ion source
  • Elemental detection from hydrogen (H) to uranium (U), high mass resolving power, often at ppm or ppb detection levels
  • Operation in microprobe or microscope mode Direct Ion Imaging using CCD or RAE systems
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